【摘要】 用XPS、AES、SEM等表面分析方法对He-Ne激光管反射镜膜的元素成分、浓度、价态以及表面形态在寿命过程中的变化作了研究,证明镜膜的损伤和沾污是激光管失效的重要因素。更多还原

【Abstract】 The change of chemical composition, concentration, valence and image of thin films for He-Ne laser mirrors within the lifetime have been studied with surface analysis methods such as XPS, SEM, and AES, etc., The results show that the damage and contamination of thin films lead to the failure of the lasers.更多还原