【摘要】 用椭圆偏振光谱法研究了热处理对射频辉光放电淀积的氢化非晶碳膜光学性质的影响。结果表明,500℃温度退火使氢化非晶碳膜的光学性质发生明显改变:折射率在短波端下降而在长波端上升,消光系数、吸收系数和反射率都随退火温度的增加而逐渐增加,而光学能隙则逐渐下降。对这些结果进行了初步讨论。更多还原

【Abstract】 Using spectroscopic ellipsometry, the influence of thermal annealing on optical properties of the plasma-deposited hydrogenated amorphous carbon films is investigated.The results show that the optical properties of these films change obviously under the condition of 500℃ annealing temperature. The refractive index is decreased at shorter wavelengths, and increased at longer wavelengths. The extinction coefficient, absorption coefficient and the reflectivity are all increased gradually with the increase of the annealing temperature. But the optical gap is decreased gradually. These resutls have been discussed.更多还原