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27keV Ar~+离子溅射Cu和CuAu靶时Cu的同位素分馏研究

Studies on the fractionation of Cu isotopes by 27 keV Ar~+ sputtering for Cu and CuAu alloy

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【作者】 王震遐陶振兰郑里平孙纯昌

【Author】 Wang Zhenxia Tao Zhenlan Zheng Liping Sun Chunchang (Shanghai Institute of Nuclear Research, Academia Sinica)

【机构】 中国科学院上海原子核研究所中国科学院上海原子核研究所

【摘要】 本文报道了27keV Ar+离子分别轰击Cu元素靶和CuAu合金靶时溅射Cu原子的同位素(63Cu和65Cu)分馏测量结果,发现:(1)对Cu元素靶,同位素分馏δf(63Cu,65Cu)=(62±27)‰,而对Cu-Au合金靶,δf=(5.9±1.6)‰;(2)δf(63Cu,65Cu)随发射角θ的变化对两者靶而言趋势是相似的,但在CuAu合金靶情况下,当θ≤40°时,δf((63)Cu,65Cu)为负值。

【Abstract】 In this paper we report results of isotopic fractionation δf(63Cu, 6SCu) In both elemental Cu and binary alloy Cu0.7Au0.3 during sputtering by Ar+ ion(27keV). The present observations show that larger mass-dependent isotopic fractionation effects accompany the sputtering process: (1) For elemental Cu target, δf(63Cu, 65Cu) = (62±27)‰, for binary alloy Cu0.7Au0. 3 target, δf(63Cu, 65Cu) = (5.9±1.6)‰; (2) Angular distributions of isotopic fractionations δf(63Cu, 65Cu) are similar in both Cu and Cu0.7Au0.3, but we note that for alloy sample(CuAu) the δf(63Cu, 65Cu)<0 at θ (angle of ejection) <45°. These retsults indicate that sputtering produces isotope fractionation and that there is difference in both angular distributions of δf for Cu target and Cu0.7Au0.3 target.

【关键词】 溅射分馏
【Key words】 sputtering fractionation
【基金】 中国科学院院内科学基金
  • 【被引频次】2
  • 【下载频次】17
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