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CuAu合金溅射原子角分布的实验研究

Study on angular distribution of atoms sputtered from Cu, Au and CuAu alloy

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【作者】 王震遐陶振兰郑里平曹德新陈淼周祖尧

【Author】 Wang Zhenxia Tao Zhenlan Zheng LipingCao Dexin Chen Miao (Shanghai Institute of Nuclear Research, Academia Sinica)Zhou Zuyao (Shanghai Institute of Metallurgy, Academia Sinica)

【机构】 中国科学院上海原子核研究所中国科学院上海冶金研究所

【摘要】 <正> 荷能离子轰击固体复合材料表面时某种成分的择优发射现象,是人们很感兴趣的研究课题。这是因为,择优发射机制至今尚不清楚。同时,很多现代表面分析设备,诸如俄歇电子

【Abstract】 Measurements of angular distribution of atoms sputtered from copper, gold element samples and Cu0.7Au0.3 alloy samples by 27 keV argon ions irradiation are reported. The following results are noteworthy: (1) All angular distributions were over cosine. The exponent, n, in fitting functions of the from connθ, was obtained, n = 1.56 and 1.61 for copper and gold samples, and n=1.78 for Cu0.7Au0.3 alloy samples respectively; (2) The angular distributions of the component atoms sputtered from Cu0.7Au0.3 alloy showed that the copper ejected was preferential.

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