【摘要】 本文提出了一种用ATR方法测定超薄膜光学常数,然后以透射率实时监控多层超薄吸收膜系厚度的方法;介绍了实验装置,分析了可能存在的误差并展示了用这种方法监控的一些镍—碳软X光反射镜的测量结果。更多还原

【Abstract】 A new thickness monitoring method for depositiny ultra thin absorbing multilayer films is suggested in this paper, which uses ART method to determine the optical constants of the film materials and monitors in real time the layer thick-ness by measuring the transmittance in visible region of the sample during deposition. Experiment eguipments, error analysis and measurement results of some samples prepared using this method are also given.更多还原