【摘要】 本文提出了两层介质减反膜的膜系设计方法,导出了用于半导体激光放大器的最佳减反膜系参数,分析了膜层厚度误差对膜系特性的影响,并在行波半导体激光放大器及光探测器上得到了满意的试验结果。更多还原

【Abstract】 This paper gives a theoretical study on the design method of the anti-reflection (AR) film for traveling wave semiconductor laser amplifiers (TWSLA). A two-dimensional digital integration is used to calculate the optimum film parameters and their allowable errors for TiO2/SiO2 AR film coated on the facets of the 1.3μ InGaAsP lasers. Such films are successfully fabricated by using the vacuum coating and two-wavelen th control technique. The reflectivity of the is lower than 3.9×10-4. By means of the AR film, we succeeded in achieving the direct amplification for the optical signal and in increasing the sensitivities of PIN & APD detectors.更多还原