【摘要】 装置是由配有微机的快速扫描分光光度计组成,在镀膜时不断测量膜层的光谱透射率曲线以监控膜厚,并作了监控三层膜的试验。 装置的性能:测量波长宽度333nm;波长点数:50点;透射率精度:±1％;光谱透射率扫描速度:12c/s。更多还原

【Abstract】 The apparatus described in this paper consists of a minicomputer coupled to a rapid-scanning spectrometer that continuously measures the spectral profile during deposition of each layer for monitoring film thickness. The apparatus is demonetrated in the monitoring of a beam splitter made of three layersPerformance of the apparatus: measuring band width: 333nm; spectral wavelength point: 50 point; transmittance accuracy: 1% spectral transmittance scan period: 12 sweep/sec.更多还原