【摘要】 本文研究了混合气体比例、气体钝化、窗口污染和存放时间对横向流动氯化氙准分子激光器寿命的影响。适当地选择各种参量,使该激光器的一次充气寿命大于10~5个脉冲,一次充气寿命大于10~5个脉冲,一次充气存放时间大于1000hr。更多还原

【Abstract】 The effects of gas mixture ratio, gas passivation, optical window deposition and laser gas storage time on the lifetime of a transverse flow XeCl excimer laser were studied in detail. By optimizing these parameters, a lifetime of more than 105 pulses was obtained with a storage time of 1000 hours for one gas fill.更多还原