【摘要】 在外部电极电容耦合的辉光放电中进行了六甲基二硅氮烷和八甲基环四硅氧烷的等离子体聚合,考察了压力、功率以及等离子气体对聚合速率的影响。用红外光谱、X—射线衍射和溶解度等方法研究了聚合物的结构,并研究了聚合物的热稳定性、耐溶剂性和疏水性,测定了聚合膜的密度和折射率。更多还原

【Abstract】 In a capacitively coupled discharge with external electrodes, hexamet-hyldisilazane and octamethylcyclotetrasiloxane were polymerized, and the effects of sys-tem pressure, discharge power and plasma gas on the polymerization rate were studied.The polymer structure was researched tbrough IR spectroscopy, X-ray diffraction andsolubility measurements, and some properties of the polymer such as thermostability.solvent resistence, hydrophobicity, density and refrection index were also determined.更多还原