【摘要】 利用在氧化气氛中,ZnO薄膜的表面电导对还原气体分压具有敏感性这一特性,可望制作ZnO薄膜气体传感器。分析表明只在较高温度下,才具有实用的灵敏度及响应速度。更多还原

【Abstract】 In oxide atmosphere, the surface conductivity of ZnO film is sensitive to the partial pressure of reducing gas. With this property, ZnO film can be used as gas sensors, but it can be used with practical sensitivity and response speed only when it is under higher temperatures because of the absorbing properties of the film surface.更多还原