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表面吸附碳对玻璃离子注入的影响

Influence of Absorbed Carbon on the Glass Surface upon Ion-Implantation

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【作者】 邹学禄

【Author】 Zhou Xuelu(Dalian Institute of Light Industry)

【机构】 大连轻工业学院

【摘要】 利用X-射线光电子能谱(XPS)测定了高铝,高硼硅酸盐玻璃As+注入前后,表面吸附碳的1s轨道电子结合能的变化,并用计算机模拟计算,分离解析了C1s光谱。探讨了注入离子与吸附碳的化学结合状态及吸附碳在玻璃表面上的分布,证明吸附碳为碳氢化合物污染物。

【Abstract】 In this paper the change of the 1s orbital electronic binding energy of the absorbed carbon caused by ion-implantation on the alumina-sillcate and borosilicate glass surfaces has been measured by means of X-ray photoelectron spectroscope (XPS), and the C? spectra has been calculated and analysed from the computer-simulation method.Having been investigated the chemical combination state of implanted ions and absorbed carbon and the distribution of the absorbed carbon on the glass surface, it has been proved that the absorbed carbon is the hydrocarbon pollutant.

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