【摘要】 本文报道了制作在(001)硅长方膜中心区域的二组共十种几何设计的横向电压型压力传感器的灵敏度测试分析结果.得到了电源电极短路效应和输出电极短路效应引起的灵敏度几何因子与器件尺寸的关系.实验结果与数值分析所得的结果相当符合.这些结果为横向电压型压力传感器几何图形的设计提供了有用的准则.更多还原

【Abstract】 The sensitivity of two groups of transverse-voltage pressure transducers fabricated at thecentral area of rectangular diaphragms is measured.The geometric factor of sensitivity relat-ed to device geometry resulting from short-circuit-effect of power supply electrodes and out-put electrodes can be obtained.The experimental results agree well with the results from thetheoretical calculation.The design rules for transverse voltage pressure transducers are thenobtained.更多还原