【摘要】 本文研究了铁对氧碳沉淀的影响.对于高碳单晶,碳沉淀减少,氧沉淀减慢;对于低碳单晶、氧沉淀增加.更多还原

【Abstract】 The effect of Fe on oxygen and carbon precipitation in silicon is investigated.After Feis doped, both carbon and oxygen precipitation decrease in CZ silicon single crystals with highcontent of carbon, while the oxygen precipitation increases in silicon single crystals with lowcontent of carbon.更多还原