【摘要】 横向压阻型压力传感器是一种新型的半导体压力传感器。它的灵敏度与一般通用的压阻全桥型压力传感器相当,但具有尺寸小,失调小,稳定性好等优点。本文除介绍横向压阻效应的基本原理和横向压阻型压力传感器的结构外,也介绍PT-6横向压阻型压力传感器的特性。该器件的灵敏度约为100μv/mmHg,频响约为O-300Hz,量程为-50～+300mmHg。本文也介绍了该器件临床应用的一些结果。更多还原

【Abstract】 A new type of pressure transducer, PT—6, has been developed using the transverse piezore sistive effect of Si. This type of pressure transducer has a similar sensitivity to the traditional bridge type piezoresistive pressure transducer but has the benefits of small size, low offset and high stability. The basic principle as well as the characteristics of the transducer are described. The sensitivity of the PT—6 deviceis about 100μν/mmHg, band width 300Hz and pressure range -50 to 300mmHg.The transducers have been applied to human patients as well as animal experiments and some of the results are reported.更多还原