【摘要】 本工作研究了冰晶石光学薄膜在2KeV电子束照射下AES的变化规律。在很低照射量下发现了一个文献未曾报道过的52.5eV的峰,并确定了它是Al(L₂₃)F(L₂₃)F(L₂₃)′的原子间Auger跃迁。测量了一些谱峰高度随照射量的变化规律,发现可以用指数型关系外推至零照射最,从而可对薄膜作出定量AES分析。此外,还讨论了冰晶石薄膜在电子束照射下破坏较快的机理。更多还原

【Abstract】 The Change of AES from cryolite optical coatings under the irradiation of electron beam was studied. At very low dose of irradiation a new peak at 52.5 ev was found, which could be ascribed to an interatomic Auger transition of type A1(2p) F(2p) F(2p)’, The change of some Auger peaks versus electron dose can be fitted to exponential curves. and extrapolated to zero dose.Thus quantitative AES analyses can be made. Besides.the mechanism of the rapid electron beam damage in such films is discussed.更多还原