【摘要】 设计了一台由微型计算机作实时控制及数据处理的自动椭偏光谱仪。它以中断为核心,把过程的自动控制、数据采集和处理结合在一起。利用这台设备测量了ITO的色散关系,并把所得到的结果和由其它方法测量得到的结果作了比较。更多还原

【Abstract】 An auto ellipsometric spectroscope which is real time controlledand data processed by a microcomputor is designed. It utilize the interrupt tocombine the process of auto controlled and data collected and processed altoge-ther in one way. The dispersion relation of the ITO film has been measuredwith this equipment and the result was compared with another methods.更多还原