【摘要】 本文提出了一种光胶盘补尝检测F—P标准具平行平板的新方法。该方法的特点是:可以检测小口径、小楔角的平板玻璃,在加工过程中不下盘就可检测面形和楔角。由于采用了光胶盘,不仅提高了面形的加工检测精度,而且可以扩充检测小楔角的范围。有利于这种难度较大的光学零件的批量加工和检测。更多还原

【Abstract】 This paper presents a new compensation method for detectingthe plano-parallel glass plates of the Fabry-perot etalon using a disk on which theparts are optically stuck. This method can detect the surface configuration andwedge angle of the plano-parallel glass plates with small aperture and small wedgeangle when the parts are not detached from the disk during manufacturing. Theaccuracy of detecting the surface configuration is increased by this method. Thedetection scope of the wedge angle is extended also. Iris convenient for the manuf-acture and the detection of optical parts, which are difficult to make and to detectusing other methods.更多还原