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等离子体技术几个方面的研究进展

REVIEW ON SOME ASPECTS OF PLASMA TECHNOLOGY

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【作者】 朱清文;

【Author】 Zhu Qing-wen(Institute of Mechanics, Academia Sinica)

【机构】 中国科学院力学研究所;

【摘要】 <正> 等离子体技术是近20年间发展起来的。它可以在很大的温度和压力范围内为不同的用途提供纯净热源气体或高温、低温反应工质,因而从一开始就引起科学家和工程师们对它的关心和兴趣。对它的研究进展很迅速,仅从1985年7月在荷兰召开的第7届国际等离子体化学会议(ISPC-7)来看,到会科学家587人,提出论文263篇,内容极其广泛,显示

【Abstract】 The recent development on some aspects of the plasma technology, containing theory, diagnostics and applications, is reviewed. Most of the information is taken from the literalure of ISPC-7. It appears that the thermal plasma modelling, thermal and low pressure plasma diagnostics and applicalions(capccially in the applications of low-pressure plasma such as plasma surface modification, plasma deposition, etching and polyincrization)have been advanced quite rapidly. Some ihcrmal plasma technologies for melting, ozone synthesis and TiO2 production have allarned industrial scale. There must be significant advance of thermal plasma processing for synthesis of ultra fine powders of new ceramic materials in two or three years. On the other hand, we should notice that the plasma technology has not been widely used in industry as originally expected. Much work for development is needed.

  • 【文献出处】 力学进展 ,Advances In Mechanics , 编辑部邮箱 ,1986年02期
  • 【被引频次】6
  • 【下载频次】270
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