【摘要】 本文对用光纤传感器非接触测量表面粗糙度的特性进行了分析。根据傅里叶非相干光成象原理,建立了测量物理模型,确定了传感器的输出值与被测参数间的关系,并将理论计算结果与实验结果进行了比较。更多还原

【Abstract】 This paper describes a non-contact method for measuring surfaceroughness by the optical fiber sensors. According to the Fourier’s principle of the optic imaging of an incoherent light system, the relation between the intensity distribution of the scattering fields and the statistics parameters of surface roughness can be determined. Therefore, a physical model for measuring surface roughness by these sensors is established. The calculation results are compared with the results of experiments.更多还原