【摘要】 设计了一台快放电双通道XeCl准分子激光器。测得该激光器两束激光间的抖动时间在一个工作大气压时为±1ns,在二个大气压时为±5ns。每个通道的激光输出能量在80～100mJ,最大约150mJ。更多还原

【Abstract】 A two channel fast discharge pumped excimer laser was designed. The jitter time bettween two output laser beams was measured as ±1 ns at the operation pressure of 1 atm,and ±5 ns at 2 atm, respectively. The output energy of each channel was 80-100 mJ, the maximum was approximatly 150 mJ.更多还原