【摘要】 本文利用从两个不同方向拍摄的试样表面结构的一组二次电子显微象,计算出三维表面结构中任意一点的空间高度、两点间的空间长度和两条直线间的夹角。本文还讨论了测量误差的来源和提高测量精度的措施。更多还原

【Abstract】 The spatial height of any point, the spatial length between two points and the angle between two straight lines in a three-dimensional surface structure are calculated with a group of secondary electron micrographs of the specimen’s surface structures, photographed from two different directions. The origin of measurement errors and measures to improve the accuracy are discussed.更多还原