【摘要】 本文介绍用激光掺杂技术在高阻硅中掺入杂质来制造核辐射结型探测器的方法。测试结果表明,所制作的这种探测器性能良好稳定,一致性好,制作周期短。更多还原

【Abstract】 In this paper fabrication of nuclear radiation detectors by using laser-doping technique is reported. Test shows that the detectors have excellent and stable properties and good consistency. In addition their fabricating period is short.更多还原