【摘要】 激光打孔是砷化镓场效应晶体管生产中的一项新技术。该工艺能够提高器件的功率和截止频率。通过对砷化镓衬底上近万个激光微孔的观察和归纳分类,我们分析了其成孔机理及微观过程;总结出了成孔规律并得出了成孔结果。更多还原

【Abstract】 Laser microd Rilling is a new technology in producing GaAs field-effect transistors (GaAsFET). The technology can enhance the power and cut-off frequency of the de- vice. Through observation and classification of nearly 10000 holes in GaAs substrates. We have made an analysis of drilling mechanism and its microsco- pic dynamic process and sumed up its regularity. Some experimental results are also given.更多还原