【摘要】 本文介绍一种使用空间滤波的实时单一镜头白光信息处理系统来检查IC光刻掩模缺陷的方法。采用这种方法比传统的镜检法或激光相干处理技术更为简单、快速,且效果明显。它能明显地检查出IC掩模里的黑点、针孔、刻痕、电路缺损、短路和断路等微小缺陷,并可检测出最小线度为2μm的缺陷。更多还原

【Abstract】 A real-time one-lens white light information processing system is described in which spatial filtering is used to spot defects on IC photomasks. Check-up with this system is simpler, faster and more convenient than the traditional microscopy or laser coherent optical processing technique. With the aid of this system, such defects as black spots, pinholes, scratches, loss of circuits, short-circuits or disconnections, etc, can easily be located, and defects as small as a minimum of 2μm linearity can also be detected.更多还原