【摘要】 本文报道了几种材料迭层结的制作工艺。通过研究薄膜的厚度和显微结构对隧道结特性的影响,给出了几种软材料薄膜的合适的厚度范围,并对这几种材料适用的氧化方法进行了研究和讨论。更多还原

【Abstract】 This paper reports the fabrication techniques for multilayer tunnel junctions of some materials. By studying the influence of the thickness and microstructure of the films upon the properties of tunnel junctions, the range of the favorite thickness for these films has been determined. Furthermore, the oxidation methods suitable for these materials are studied and discussed.更多还原