【摘要】 本文介绍了一种压电陶瓷微补偿器，其位移输出与输入电压呈线性关系，满量程误差小于0.6%；在频率低于500Ｈz时的动态性能颇为理想；模拟静压轴承的主轴回转误差进行仿真试验，补偿器的输出位移信号与其模拟输入信号，在２０Ｈz(１２００r／ｍｉｎ）下是十分相近的．更多还原

【Abstract】 A piezo-electric-ceramics micro-displacement compensator is introduced which can convert electric voltage proportion to mechanical displacement with linearity error less then 0. 6 percent. The dynamic characteristics of the compensator under 500Hz is satisfactory. The output diagram of the compensator is similar to the input diagram which simulates the spindle error motion of precision lathe under frequency of 20Hz.更多还原