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分子束外延高性能P型GaAs单晶薄膜

MBE Growth of High Quality P Type GaAs Films

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【作者】 梁基本孙殿照陈宗圭黄运衡孔梅影

【Author】 Liang Jiben/Institute of Semiconductors, Academia SinicaSun Dianzhao/Institute of Semiconductors, Academia SinicaChen Zonggui/Institute of Semiconductors, Academia SinicaHuang Yunheng/Institute of Semiconductors, Academia SinicaKong Meiying/Institute of Semiconductors, Academia Sinica

【机构】 中国科学院半导体研究所中国科学院半导体研究所

【摘要】 用国产分子束外延设备生长出性能优良、表面平整光洁的GaAs。不掺杂的P型GaAs空穴浓度为 2-8×1014cm-3,室温迁移率为360-400cm2/V·s.使用国产材料,纯度为 2N5并经我们“提纯”的 Be作为 P型掺杂剂.掺 Be的 P型GaAs空穴浓度范围从1.0 × 1015至6×1015cm-3.其室温迁移率与空穴浓度的关系曲线与国外文献的经验曲线相符.当空穴浓度为1—2 ×1015cm-3时,室温迁移率达 400cm2/V·s.低温(77K)迁移率为 3500—7000cm2/V·s.在4.2K下对不同空穴浓度的P型GaAs样品进行了光荣光测量和分析.

【Abstract】 High quality P-type GaAs films have been grown by a home made molecular beam epi-taxy system.Undoped GaAs films are found to be P type with free hole concentration (2-8)×1014cm-3 and mobility 360-400 cm2/V.s at room temperature.P type GaAs films are do-ped with Be of 99.5% purity which has been "purified" by the authors.The mobilities as afunction of free hole concentrations ranging from 1.0×1015 to 6×1019 cm-3 are in agreementwith the empirical curve at room temperature.P type GaAs films have been measured and stud-ied with photoluminescence at 4.2 K.

  • 【文献出处】 半导体学报 ,Chinese Journal of Semiconductors , 编辑部邮箱 ,1986年06期
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