节点文献
GaAs(110)表面自体氧化层的XPS研究
AN INVESTIGATION OF GaAs (110) SURFACE NATIVE OXIDE LAYER BY XPS
【摘要】 用XPS研究了不同表面处理后GaAs(110)表面自体氧化层及其与GaAs衬底间的界面特性,初步探讨了自体氧化层的形成过程。
【Abstract】 GaAs(110)surface native oxide layer and interface properties between native oxide layer and GaAs substrate have been studied by XPS after surface treatment. The formation process of the native oxide layer has been briefly discussed.
- 【文献出处】 真空科学与技术 , 编辑部邮箱 ,1985年03期
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