节点文献
激光椭偏仪多角入射法测定磁性石榴石薄膜的厚度和折射率
The Determination of Thickness and Refractive Index of Magnetic Garnet Films by Multiple Angle Laser Ellipsometry
【摘要】 本文叙述了椭偏仪在测量磁性单晶薄膜的光学常数和厚度中的应用。采用“多角入射法”,在波长6328(?),直接判别膜厚周期 D(?)的正整数倍 m(?),从而计算出2(?)>360°时外延膜的真空厚度.在入射角为75.0°时,我们测量了上述薄膜的厚度和折射率的重复误差。
【Abstract】 Applications of ellipsometry for measuring thickness and optical properties of magne-tic single crystal films is described in this paper.Using multiple-angle-of incidence method,at λ=6328(?),the integer multiple m1 of film thickness period DΦ is directly determined to calculate thetrue film thickness of epitaxial films as 2δ>360° .We measured repeated errors of these film thick-ness and refractive index at angle of incidence 75.0°.
- 【文献出处】 应用激光 ,Applied Laser , 编辑部邮箱 ,1985年06期
- 【被引频次】6
- 【下载频次】108