【摘要】 本文叙述了椭偏仪在测量磁性单晶薄膜的光学常数和厚度中的应用。采用“多角入射法”,在波长6328(?),直接判别膜厚周期 D(?)的正整数倍 m(?),从而计算出2(?)>360°时外延膜的真空厚度.在入射角为75.0°时,我们测量了上述薄膜的厚度和折射率的重复误差。更多还原

【Abstract】 Applications of ellipsometry for measuring thickness and optical properties of magne-tic single crystal films is described in this paper.Using multiple-angle-of incidence method,at λ=6328（?）,the integer multiple m₁ of film thickness period D_Φ is directly determined to calculate thetrue film thickness of epitaxial films as 2δ>360° .We measured repeated errors of these film thick-ness and refractive index at angle of incidence 75.0°.更多还原