【摘要】 本文报导一台小型的实用准分子激光器。其预电离和主放电在同一条通道上,具有预电离效果好,输出稳定的特点。对采用不同的缓冲气体和工作气体所得的结果作了分析和比较.更多还原

【Abstract】 A small sized practical excimer laser with specific and simple structure is presented inthis paper.It features good preionization effect and stable energy output.A comparison and analysishave been made on the results when different buffer gases and gas mixtures are adopted.更多还原