【摘要】 光盘录刻系统的一个重要参数是系统的最小可能焦斑尺寸。本文描述一种测量亚微米级焦斑的方便而精确的测量技术。测试装置包括对焦及微调机构;刀口/光检测器扫描部分和光栅读数刀口定位部分。更多还原

【Abstract】 The size of the smallest possible focused spot is one important system parameter ofoptical disc recording system.This paper describes a convenient and accurate technique for measuringthe submicron spot.The measuring apparatus consists of three subsystems:(a)focused spot findingand adjusting system;(b)scanning knife-edge/photodetector system;(e)optical 4 dividing gratingsystem which provides a metric for the knife-edge displacement.更多还原