【摘要】 本工作依据文献[1]的理论,从实验上最后得出了表面粗糙样品的透射率、反射率与特征粗糙度、吸收系数及波长的具体函数关系,并验证了文献[1]提出的某些关键性的结论,及用透、反射结合方法测量表面粗糙样品参数的可行性。在实际应用中,透、反射结合法所测吸收系数与其他方法所测结果符合较好。更多还原

【Abstract】 According to the theoretical lines of a previous paper by the auther, optical transmittance and reflectance of silicon sample with rough surface as the function of characteristic roughness, absorption coefficient and wavelength are derived experimentally. The major theoretical conclusions and possibility of determination of optical parameters by use of transmission combined with reflection measurements are verified. The values of absorption coefficient obtained from present method are compared with those of existing procedure, and the coincidence is presented.更多还原