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高温高密度等离子体和金属合金表面相互作用研究
INVESTIGATION OF INTERACTION BETWEEN PLASMA AND SURFACE OF METALS
【摘要】 本文介绍一台自行改装调试成功的9kJ高温高密度等离子体焦点装置(20kV,48μF)并利用它研究了金属铌、钼,Ni-Cr合金以及不锈钢等材料表面与等离子体的相互作用。借助于电子显微镜,俄歇电子能谱仪,X光衍射技术观测方法,获得了上述材料被焦点辐照瞬间的离子注入,单极电弧,溅射现象,Frenkel缺陷等重要物理过程的信息。对材料辐照损伤的机理作了初步讨论。
【Abstract】 In this article a high-temperature and high-density 9kJ plasma focusing device (20kV, 48μF) is described. The interaction between plasma and the surface of metallic materials such as Nb, Mo, Ni-Cr alloy and stainless steel was studied by using this device. Important information including ion implantation, unipolar arcing, sputtering, Frenkel defect, etc. was obtained by electron microscope, AES and X-ray diffraction. Finally, the mechanism of the surface radiation damage is discussed.
【关键词】 相互作用;
离子注入;
单极电弧;
溅射现象;
Frenkel缺陷;
【Key words】 Interaction; Ion implantation; Unipolar arcing; Sputtering; Fre-nkel defect.;
【Key words】 Interaction; Ion implantation; Unipolar arcing; Sputtering; Fre-nkel defect.;
- 【文献出处】 核聚变与等离子体物理 ,Nuclear Fusion and Plasma Physics , 编辑部邮箱 ,1985年03期
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