【摘要】 本文研究了S/D=0.2～1.0（间隔O.1）,其中D=1/2（D₁+D₂）;D₁/D₂=5,10,20;Yr/（NI）～2=0.004～0.024（间隔0.002）的非对称磁透镜。得到了轴上磁场的相对分布,轴上磁场强度的最大值及最大值的位置。描绘了非对称磁透镜中典型的旁轴电子轨迹。计算了完整的高斯光学参量及最重要的象差系数——球差系数和色差系数。讨论了物方特性和象方特性的差异。这些结果为扫描电子显微镜和电子探针系统的设计提供了数据资料。更多还原

【Abstract】 Unsymmetrical magnetic lenses with S/ D=0.2¹.0（Step=0.1）, where D=1/2 （D₁+D₂）. D_l/D₂=5,10,20 and Vr/ （NI）²=0.004⁰.024（Step=0.002）are studied. The relative distri-bution of the axial field of the lenses, the maximum magnetic field strength along the lens axis and the position of the maximum are obtained. The typical paraxial electron trajectories in an ansymmetrical lens are plotted. The Gaussian optical parameters and the most important aberration coefficients-spherical aberration coefficient and chromatic aberration coefficient are calculated. The differences between objective space properties and image space properties are discussed. These results can be used for the design of SEM and electron-probe systems.更多还原