【摘要】 报道了离子注入CW CO₂ 激光退火硅光电二极管的结果.激光退火工艺与热退火工艺进行了比较,表明这种器件具有峰值响应波长短、蓝光灵敏度高等优点.在波长为4000A时量子效率达0.64.通过测量结深、杂质浓度分布及缺陷的观测,解释了CW CO₂激光退火工艺优于热退火工艺的原因.更多还原

【Abstract】 The results of CW CO₂-laser annealing on ionimplanted silicon photodiodes are re-ported.Compared with furnace annealing,the laser annealing diodes have shorter wa-velength of maximum responsivity and higher blue-light sensitivity.The quantum ef-ficiency is 0.64 at 4000 A.The superiority of CW CO₂-laser annealing over furnace an-nealing is explained through the measurements of junction depth,the impurity profileand the observation of defects.更多还原