【摘要】 本文提供一种较精确的表面微区俄歇定量分析方法——组元素标样法,并在两个系统中对具有0.0<x<0.9的Al_xGa_1-xAs样品进行了俄歇定量检测。检测结果与电子探针和X射线双晶衍射的结果进行比较,发现二者相当一致,与电子探针和双晶衍射之平均相对偏离分别为7.3％和14.7％。与相对灵敏度因子法相比,分析精度可分别提高约1倍和3倍。更多还原

【Abstract】 A series of elemental standards approach, which can be applied to quantitative micro-area analysis by means of an Auger electron spectroscopy with rather good accuracy, is given.Using this approach samples of Al_xGa_1-x As With 0.0<x<0.9 were examined in two different system of AES. The results of examinations were compared with that obtained by electron microprobe and x-ray double crystal diffractometry. It is shown that they are in rather good accordance with one another. The relaitve deviation between AES and EPMA is 7.3％, and the relative deviation between AES and XDCD is 14.7％. Comparing to the results computed by “the relative elemental sensitivity factors approach” （See ф handbook）, we have found that the accuracy of the quantitative analysis with the present approach is 1—3 times increased respectively.更多还原