【摘要】 本文研究了Nd、Mn和In元素改性的PbTiO₃压电陶瓷及其声表面波滤波器。压电陶瓷的化学通式为(Pb_1-3/2x+1/2zNd_x)(Ti_1-y-zMn_yIn_z)O₃。本文还详细地讨论了组份配比为x=0.10,y=0.02和z=0.06的压电陶瓷的制造工艺条件（包括原料处理、成型、烧成温度及气氛条件、保温时间等）对样品性能的影响。采用静水压成型、通氧烧结等工艺得到了密度为7.64g/cm³、气孔小、晶粒尺寸为0.8—1.5μm、传输损耗为6dB/cm、V₃=2488m/s、K_s²=2.1％、ε₃₃^T/ε_o=240、Q_m值为1390、TDC=-26ppm（-40—+60℃）和居里温度为340℃的适用于声表面波器件的压电陶瓷。用此种陶瓷为基片,制成了25MHz、37MHz、44MHz的声表面波滤波器,其优点是插入损耗小和一致性好。更多还原

【Abstract】 Some results of PbTiO3 ceramics modified by Nd, Mn and In cation additives are Presented in this paper as well as their surface acoustic wave filters,The nominal chemical formula of this ceramic system is (Pb1-3/2x+1/2xNdx) (Ti1-r-zMnyIns)O3.Emphasis is put upon the influence of the technological conditions (the treatment of raw material, molding, sintering temperature, atmosphere conditions, time of temperature preservation, etc.)for the above ceramic material whose dosage ratio x=0.10, y=0.02 and z=0.06 on the characteristics of the samples. By using the technology of sample molding under static hydraulic pressure and sintering in oxygen atmosphere,the PbTiO3 is obtained which is available for surface acoustic wave devices.The material shows small porosity.and the density of 7.64g/cm3, the crystallize size of 0.8-1.5m with the propagation loss of~6dB/cm, Vs~2488m/s, ks2-2.1%, dielectric constant 33T/0 as low as~240 and temperature coefficient TCD equal to-26ppm (-40-+60℃) and the Curie temperature 340℃.By using this material as the substrate surface acoustic wave filters at 25,37 and 44MHz are fabricated which show the advantages of good uniformity and low insertion loss.更多还原