【摘要】 本文介绍一台具有我国自行设计的独特风格的图形发生器。该机以30个基本图形用“积木”拚图法,在闭环控制下进行中曝光的方式获得较高的制板效率。工作成果表明,其重复定位精度、所制板图的套合精度以及图形质量均达到国内先进水平。更多还原

【Abstract】 This paper describes a unique pattern generator. It generates patterns by using thirty fixed patterns as basic block and using close loop control for exposure. It can obtain higher efficiency of mask-making. The results show that its repetitive positioning accuracy, overlap accuracy of masks and quality of masks have reached advanced level in China.更多还原