【摘要】 本文描述一台紫外光预电离闭合循环XeCl准分子激光器的性能。在一次充气,每秒10次重复率,平均功率达1瓦,连续运转超过2.4×10~5个脉冲后,输出功率降至初始值的一半。更多还原

【Abstract】 A close-cycled and flowing XeCl excimer laser is described in this paper: It can be operated contineously 2.4×10~5 shots at a repetition rate of 10 Hz with an average output power of 1000 mw on each gas replenishment.更多还原