【摘要】 叙述了用测量到的椭偏角ψ及Δ来确定光学薄膜的折射率、厚度和消光系数的方法.该方法收敛较快并节省时间.更多还原

【Abstract】 A method for determining the refractive index, thickness and extinction coefficient of optical films from measured ellipsometric ψ and Δ is described. This method is founded more convergent and time-saving parameters.更多还原