【摘要】 针对离子束刻蚀对石英晶体造成损伤的主因,采取合适的刻蚀工艺和减轻晶片损伤的措施,可使石英谐振器的性能获得显著改善。本文报道了使这类谐振器基频达456MHz的实验制作结果。更多还原

【Abstract】 The quartz crystal damages due to ion beam milling is analysed and suitable milling conditions and some damage-reduction measures are proposed. As a result, the UHF resonaors have low equivalent resistance, high Q value, fine frequency response and usable mechanical property.更多还原