【摘要】 本文用红外吸收谱和统计理论分析低压CVD生长的半绝缘多晶硅（SIPOS）薄膜的组分.SIPOS 薄膜包含SiO 和SiO₂以及它们之间的硅氧化物.而且随着膜中氧浓度的增加,其SiO₂的比例也增加.更多还原

【Abstract】 The composition of oxygen doped semi-insulating polycrystalline silicon filmsgrown by LPCVD method are analyzed with the infrared absorption spectra and thestatistical theory.These films consist of SiO, SiO₂ and an oxide intermediate betweenthe two.The SiO₂ composition in SIPOS films increases as the oxygen concentratiorin the films increases.更多还原