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一种新型的整体式镓离子源的研制

Investigation on a Novel Integral Liquid Gallium Ion Source

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【作者】 陈春华; 王纯; 张立宝; 马祥彬; 李金荣;

【Author】 Chen Chunhua/Institute of Semiconductors, Academia SinicaWang Chun/Institute of Semiconductors, Academia SinicaZhang Libao/Institute of Semiconductors, Academia SinicaMa Xiangbin/Institute of Semiconductors, Academia SinicaLi Jinrong/Institute of Semiconductors, Academia Sinica

【机构】 中国科学院半导体研究所; 中国科学院半导体研究所;

【摘要】 本文叙述了一种比较新颖的整体式液体镓离子源的制备工艺及挂镓方法;测量了在不同温度下的电流-电压关系;以及在特定电压下,电流随时间的缓慢变化;对于针尖的几何形状,即顶点处的曲率半径对电流-电压关系的影响,用两种典型的针尖作了比较;试验还表明,这种源结构比较简单,容易实现和掌握,其寿命可达110小时以上.

【Abstract】 The techique of making a novel integral liquid gallium ion source and the methodof coating with gallium are described.The current vs.voltage relationships under va-rious temperatures are measured.The current changes slowly with time under a defi-nite voltage.The influence of the geometry of the needle tip,i.e. the radius of cur-vature at its apex,on the I-V relationship is investigated by comparison of two typ-ical needle tips.The experiments show that the construction of this source is simple,thereby it can be easily made and mastered,and its lifetime can reach over 110 n.

  • 【文献出处】 半导体学报 ,Chinese Journal of Semiconductors , 编辑部邮箱 ,1984年05期
  • 【被引频次】2
  • 【下载频次】28
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