【摘要】 本文研究了用氦和氢作为硅烷的稀释气体对GD淀积的a-Si:H膜的光电性质的影响.测量了用两种稀释气体GD淀积的a-Si:H膜的光电导、光学带隙、红外吸收和光致发光.实验结果表明用氦稀释硅烷GD淀积的a-Si:H膜有更低的缺陷态密度,是一种廉价薄膜太阳电池可供选择的基本材料.更多还原

【Abstract】 The effect of hydrogen and helium dilution of silane on the optical and electricalproperties of GD deposited a-Si:H films was investigated by photo-conductivity,opti-cal absorption,infrared absorption and photoluminescence measurements.The experi-mental results show that in eomparision with a-Si:H prepared from a mixture ofsilane and hydrogen,a-Si:H prepared from a mixture of silane and helium possessesa lower density of defect states,and is a kind of basic material of low cost for solarcells.更多还原