节点文献
Pt/Si和Pd/Si肖特基接触的XPS研究
An Investigation of Pt/Si and Pd/Si Schottky Contacts by XPS
【摘要】 用XPS测量了Pt/Si和Pd/Si 肖特基接触界面处的芯态谱和价带谱.界面处有硅化物M2Si存在,对界面处金属芯态谱随光电子发射角变化的反常现象作了初步探讨.
【Abstract】 The spectra of the core level and valence band at Pt/Si and Pd/Si Schottky contactshave been measured by XPS.The result shows the existence of silicide of M2 Si at the in-terface.Anomalous phenomenon of the metal core spectra change with photoelectron emis-sion angle has been discussed briefly.
- 【文献出处】 半导体学报 ,Chinese Journal of Semiconductors , 编辑部邮箱 ,1984年03期
- 【被引频次】1
- 【下载频次】98