节点文献

场致发射液体镓离子源的研制

Investigation of the Field-Emitted Liquid Gallium Ion Source

  • 推荐 CAJ下载
  • PDF下载
  • 不支持迅雷等下载工具,请取消加速工具后下载。

【作者】 马祥彬王纯陈春华张立宝李金荣凌仲珪

【Author】 Ma Xiangbin/Institute of Semiconductors,Academia SinicaWang Chun/Institute of Semiconductors,Academia SinicaChen Chunhua/Institute of Semiconductors,Academia SinicaZhang Libao/Institute of Semiconductors,Academia SinicaLi Jinrong/Institute of Semiconductors,Academia SinicaLing Zhonggui/Institute of Semiconductors,Academia Sinica

【机构】 中国科学院半导体研究所中国科学院半导体研究所

【摘要】 描述了研制的液体镓离子源的结构工艺,并对该离子源的电流与引出电压的关系,电流与温度的关系,亮度等进行了测试和讨论.该离子源的性能现已达到:亮度=1.3×1012mA/cm2·rad2(在α=8°30'张角内测量);阈值电压5kV左右;寿命>50小时.

【Abstract】 The construction and technology of liquid gallium ion source are developed.The cur-rent vs.extraction voltage and the current vs.temperature as well as the brightness of thesource are measured and discussed.The present performances of ion source are as follows:the brightness equals to 1.3×1012mA/cm2 rad2 (at beam angle α=8°30′),the thresholdvoltage is about 5 kV,the life time is over 50 h.

  • 【文献出处】 半导体学报 ,Chinese Journal of Semiconductors , 编辑部邮箱 ,1984年02期
  • 【被引频次】6
  • 【下载频次】61
节点文献中: 

本文链接的文献网络图示:

本文的引文网络