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场致发射液体镓离子源的研制
Investigation of the Field-Emitted Liquid Gallium Ion Source
【摘要】 描述了研制的液体镓离子源的结构工艺,并对该离子源的电流与引出电压的关系,电流与温度的关系,亮度等进行了测试和讨论.该离子源的性能现已达到:亮度=1.3×1012mA/cm2·rad2(在α=8°30'张角内测量);阈值电压5kV左右;寿命>50小时.
【Abstract】 The construction and technology of liquid gallium ion source are developed.The cur-rent vs.extraction voltage and the current vs.temperature as well as the brightness of thesource are measured and discussed.The present performances of ion source are as follows:the brightness equals to 1.3×1012mA/cm2 rad2 (at beam angle α=8°30′),the thresholdvoltage is about 5 kV,the life time is over 50 h.
- 【文献出处】 半导体学报 ,Chinese Journal of Semiconductors , 编辑部邮箱 ,1984年02期
- 【被引频次】6
- 【下载频次】61