【摘要】 本文研究了与(100)晶面错向的衬底上砷化镓液相外延层的表面形貌.随着外延层厚度的增加,先后观察到了鳞片状结构、水波纹结构和平行阶梯结构.本文对这形貌变化的机构作了讨论.我们还看到当外延层厚度是 2.1—2.2μm时,只有错向<4＇表面才光亮平整.当外延层厚到2.5-3μm时,错向<5＇即可获得光亮的表面.更多还原

【Abstract】 The surface morphology of GaAs LPE layers grown on substrates misoriented from the(100) plane has been studied.With the increasing of the thickness of epitaxial layers,scales,ripples and terraces are observed successively.The mechanism of the change of the morpho-logy has been discussed.It is found that,when the thickness of LPE layers is 2.1-2.2μm,smooth planar surfaces can be obtained only if the misorientation θ<4’,and when the thic-kness is 2.5-3μm,smooth surfaces can also be obtained on substrates if the misorientionθ<5’.更多还原