【摘要】 <正> 利用数控离子束刻蚀机,在铌酸锂、锗酸铋和石英压电晶片上,溅射刻蚀等深度和深度加权沟槽反射栅,制作了声表面波谐振器和脉冲压缩滤波器。选用合适参数和刻蚀程序,槽深分布接近理论值。一、引言利用沟槽栅阵对声表面波(S AW)的反射特性制作的SAW器件,如脉冲压缩滤波器(RAC)和沟槽谐振器,具有优良的更多还原

【Abstract】 A digital controlled ion-beam etching machine has been used for sputter etching grooves of reflection gratings which are in the same depth and depth-weighting on crystal sudstrates of LiNbO₃,Bi₁2 Geo₂₉ and SiO₂.We have made surface-acoustic-wave resonators and pulse compres- sion filters. By proper selection of technical parameters and etching programs, the depth dist- ribution of grooves approximates to the theoretical value.更多还原