【摘要】 研制了一台阳极15厘米的轴向发散磁场结构考夫曼型离子源,设计了改善束流密度均匀性的匹配栅和提高束流密度的聚焦束位移孔球面棚,仅更换这两种多孔栅离子引出系统,可提供均匀区φ10.5厘米(均匀度优于±5％)、束散角小于9°的均匀束和峰值密度11.4毫安/厘米~2,在φ4厘米的靶上平均密度为6毫安/厘米~2的聚焦束。更多还原

【Abstract】 We have developed a Kaufman ion source which has 15 cm diameter anode and axial div-ergence magnetic field, and have designed flat grids of density match for improving uniformity of beam density as well as spherical grids of apertures displacement for increasing beam density. If only by exchange between these two kinds of multiaperture grid ion extraction systems, the source may provide either Uniform beam which has 10.5 cm diameter Uniform area(Uniformity better than ±5%) and divergence angle less than 9°or focused beam which has 11.4 ma/cm~2 beam peak density and 6 ma/cm~2 beam average density on 4 cm diameter target area.更多还原