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离子注入和离子束混合金属表面改性的某些研究

SOME EXEPERIMENTAL STUDIES ON METAL ION IMPLANTATION AND ION BEAM MIXING

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【作者】 李恒德; 汪泓宏; 张效忠; 陈鹤鸣;

【Author】 Li Heng-De Wang Hong-Hong Zhang Xiao-Zhong Chen He-Ming Department of Engineering Physics,Qsinghua University,Beijing

【机构】 清华大学; 清华大学;

【摘要】 本文综合报导了清华大学近年来在离子注入和离子束混合金属表面改性研究方面所取得的成果。N+离子注入使GCrIS等近十种钢材的耐磨性能提高几倍到上百倍。钢材的热处理状态、离子注入剂量、剂量率对钢材的注入效果有很大影响。N+离子注入对车刀耐磨性无明显改善。电化学性能研究说明,B+、P+离子注入显著地改善了镍和S.S.316L在水溶液中的抗蚀性能。电子衍射分析表明,某些试样得到了非晶态结构。用离子束混合方法分别在Cu-Ag系和Fe-Ti系中得到一系列单相亚稳态合金,它们的点阵常数与成分呈稍有隆起的直线关系。其中Fe55Ti45得到非晶态,并研究了其加热转变。

【Abstract】 Results of some experiments on metal ion implantation and ion beam mixing are rep-orted. Two kinds of wearing test device(pin-on-disc type and cross cylinder type) have been installed and used for samples implanted. The wearing behavior of several types of steels has been studied before and after N+(or N++N2+) implantation. Results show sub-stantial increase of the wear resistance of steels by implantation. The effects of heat treat-ment, dosage and dose rate used in experiments have been studied. The aqueous corrosion behavior of S.S. 316L and pure nickel implanted with B+ P+ has been Studied. Polarization curves show substantial increase of corrosion resistance by implantation, particularly at doses which produce amorphous state. Single phase structures have been obtained for both multilayered Cu-Ag and Fe-Ti systems after ion mixing with 30OKev Xe+. Lattice constants of these metastable solid so-lutiors lie on a continuous line as dictated by Vegard’s law though with some slight devia-tions. An amorphous state was obtained for Fe55Ti45. It had a single phase structure, and then converted into two equilibrium phases during annealing at 210℃ and 350℃ respec-tively. Ti/Fe single layer specimen seems to give much improved electrode behavior by ion mixing.

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